Title :
An improved method for automatic detection and location of defects in electronic components using scanning ultrasonic microscopy
Author :
Bechou, Laurent ; Dallet, Dominique ; Danto, Yves ; Daponte, Pasquale ; Ousten, Yves ; Rapuano, Sergio
Author_Institution :
Microelectron. Lab., Univ. of Bordeaux, Talence, France
fDate :
2/1/2003 12:00:00 AM
Abstract :
Deals with a method for the automatic analysis and characterization of defects due to encapsulation and/or surface mount processes of microelectronic devices. This method is based on digital signal processing of ultrasonic signals in the 10-100-MHz frequency range. In particular, it is used for automatic evaluation of time-of-flight between echoes received by the acoustic transducer. The signals are first pre-processed by a new algorithm, based on Wiener filtering, and then by a numeric algorithm, based on the wavelet transform, already applied successfully to this problem. The pre-processing phase increases the sensitivity of the successive numeric algorithm. The theory underlying the pre-processor and the chosen procedure to implement it are described in detail in this paper. Furthermore, experimental results obtained by applying the proposed method on acoustic signals from an electronic structure acquired through an ultrasonic scanning system are given and discussed.
Keywords :
Wiener filters; acoustic microscopy; chip-on-board packaging; encapsulation; surface mount technology; ultrasonic applications; wavelet transforms; 10 to 100 MHz; COB technology; Wiener filtering; acoustic transducer; automatic detection; digital signal processing; electronic components; electronic structure; encapsulation; scanning ultrasonic microscopy; surface mount processes; time-of-flight; wavelet transform; Acoustic transducers; Digital signal processing; Electronic components; Encapsulation; Filtering algorithms; Frequency; Microelectronics; Scanning electron microscopy; Signal processing; Signal processing algorithms;
Journal_Title :
Instrumentation and Measurement, IEEE Transactions on
DOI :
10.1109/TIM.2003.809071