Development of a new type of self-scanned electron image sensing integrated circuit

Author

Hatfield, John V. ; York, Trevor A. ; Comer, John ; Hicks, Peter J.

Author_Institution

Dept. of Electr. Eng., Univ. of Manchester Inst. of Sci. & Technol., UK

Volume

24

Issue

3

fYear

1989

fDate

6/1/1989 12:00:00 AM

Firstpage

704

Lastpage

710

Abstract

The design and fabrication of an integrated circuit which is a position-sensitive detector for low-energy (typically up to 100 eV) charged particles are discussed. The device comprises a linear array of electron-sensing electrodes coupled to detection and readout circuitry in the form of amplifiers and counters all integrated onto a single CMOS chip. The chip is intended to replace existing position-sensitive detection systems in electron spectrometers

Keywords

CMOS integrated circuits; electron spectrometers; image sensors; particle beam diagnostics; position sensitive particle detectors; CMOS chip; amplifiers; counters; electron image sensing; electron spectrometers; electron-sensing electrodes; fabrication; integrated circuit; linear array; low energy charged particles; position-sensitive detector; readout circuitry; self-scanned IC; Electron tubes; Energy loss; Instruments; Mass spectroscopy; Microchannel; Molecular beams; Monitoring; Object detection; Position sensitive particle detectors; Signal resolution;

fLanguage

English

Journal_Title

Solid-State Circuits, IEEE Journal of

Publisher

ieee

ISSN

0018-9200

Type

jour

DOI

10.1109/4.32029

Filename

32029