Title :
Development of a new type of self-scanned electron image sensing integrated circuit
Author :
Hatfield, John V. ; York, Trevor A. ; Comer, John ; Hicks, Peter J.
Author_Institution :
Dept. of Electr. Eng., Univ. of Manchester Inst. of Sci. & Technol., UK
fDate :
6/1/1989 12:00:00 AM
Abstract :
The design and fabrication of an integrated circuit which is a position-sensitive detector for low-energy (typically up to 100 eV) charged particles are discussed. The device comprises a linear array of electron-sensing electrodes coupled to detection and readout circuitry in the form of amplifiers and counters all integrated onto a single CMOS chip. The chip is intended to replace existing position-sensitive detection systems in electron spectrometers
Keywords :
CMOS integrated circuits; electron spectrometers; image sensors; particle beam diagnostics; position sensitive particle detectors; CMOS chip; amplifiers; counters; electron image sensing; electron spectrometers; electron-sensing electrodes; fabrication; integrated circuit; linear array; low energy charged particles; position-sensitive detector; readout circuitry; self-scanned IC; Electron tubes; Energy loss; Instruments; Mass spectroscopy; Microchannel; Molecular beams; Monitoring; Object detection; Position sensitive particle detectors; Signal resolution;
Journal_Title :
Solid-State Circuits, IEEE Journal of
