Title :
A new method to compute registration error from DFM type test structures
Author :
Kundu, Nikhil N. ; Rahman, M.A.
Author_Institution :
Limerick Univ., Ireland
fDate :
5/1/1992 12:00:00 AM
Abstract :
A new method to compute registration error from the slanted die-fit-monitor (DFM)-type test structures using an on-line calibration curve has been presented. The method is suitable for use in Keithley 350, parametric measurement systems for estimation of registration error during measurement where available computing power is limited. The results obtained from this method are compared with the registration errors calculated from the standard DFM structure
Keywords :
lithography; position measurement; Keithley 350; die fit monitor test structures; microlithography; on-line calibration curve; parametric measurement systems; registration error computation; registration error estimation; slant DFM structure; standard DFM structure; Calibration; Circuit testing; Computational geometry; Conductivity; Design for manufacture; Equations; Integrated circuit measurements; Power measurement; Resistors; Voltage;
Journal_Title :
Semiconductor Manufacturing, IEEE Transactions on
