MEMS Scanning Calorimeter With Serpentine-Shaped Platinum Resistors for Characterizations of Microsamples

We report a new design and operation of a microelectromechanical systems (MEMS) differential scanning calorimeter (DSC) for heat-capacity measurements. The sensor consists of a 500-nm silicon nitride membrane supported by four bridges on a silicon wafer. On one side of the membrane, a serpentine-shaped platinum layer is deposited and used as both a resistive heater and a thermometer during the DSC measurement. This MEMS design can provide a self-alignment between the DSC cell and the material to be analyzed in order to prevent its deposition on the sloping side walls of the silicon frame. According to FEM calculations, the system exhibits good thermal isolation and high uniformities in the temperature field in the sensing area of the device. To evaluate the use of this calorimetric device for liquid samples, we measure the heat of vaporization of nanoliter-scale water droplets with high preciseness using the calorimeter in both scanning and heat conduction modes.