Title :
Double beam RF MEMS switches for wireless applications
Author :
Lee, K. ; Liu, R. ; Kim, B.C.
Author_Institution :
Dept. of Electr. Eng., Arizona State Univ., Tempe, AZ, USA
fDate :
3/20/2003 12:00:00 AM
Abstract :
A double cantilever beam MEMS switch has been developed for wireless applications. The two beams are controlled by a single actuation electrode. This switch has low pull-in voltage of 15 V and fast switching speed of 60 μs. An RF performance with >-50 dB isolation below 5 GHz and <-0.18 dB up to 30 GHz was observed.
Keywords :
microswitches; radio equipment; 15 V; 5 to 30 GHz; 60 mus; double cantilever beam MEMS switch; pull-in voltage; single actuation electrode; wireless applications;
Journal_Title :
Electronics Letters
DOI :
10.1049/el:20030358
