Global performance evaluation of various on-chip square spiral inductors on GaAs substrates

Experimental and simulation results are presented for the performance evaluation of various on-chip spiral inductors on GaAs substrates. These inductors were fabricated with different track widths and turn numbers, but identical track spacing. Based on the proposed equivalent lumped circuit model for the inductors and the experimental de-embedded S-parameters, the inductance, Q-factor, self-resonance frequency, and figure-of-merit indicator of these inductors are determined. Excellent agreement between measurement and simulation results is achieved. Some local scalable formulas are obtained to describe the global performance of these inductors.