• DocumentCode
    1175282
  • Title

    Recycling method for used slurry by annealed filtering

  • Author

    Seo, Y.-J. ; Kim, N.-H. ; Lee, W.-S.

  • Author_Institution
    Dept. of Electr. & Electron. Eng., Daebul Univ., Chonnam, South Korea
  • Volume
    40
  • Issue
    24
  • fYear
    2004
  • Firstpage
    1553
  • Lastpage
    1554
  • Abstract
    Abrasive powder was collected and annealed so that it could be used to promote the mechanical strength of reduced abrasion force. Chemical mechanical polishing characteristics between self-developed KOH-based silica abrasive slurry and original slurry were investigated. Experimental results showed comparable removal rate and good planarity with commercial products.
  • Keywords
    abrasion; annealing; chemical mechanical polishing; mechanical strength; potassium compounds; powders; recycling; silicon compounds; slurries; KOH based silica abrasive slurry; KOH-SiO2; abrasive powder; annealed filtering; chemical mechanical polishing characteristics; commercial products; mechanical strength; recycling method; reduced abrasion force;
  • fLanguage
    English
  • Journal_Title
    Electronics Letters
  • Publisher
    iet
  • ISSN
    0013-5194
  • Type

    jour

  • DOI
    10.1049/el:20045730
  • Filename
    1363672
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=1175282