• DocumentCode
    1175902
  • Title

    Micromachined inverted F antenna for integration on low resistivity silicon substrates

  • Author

    Öjefors, Erik ; Grenier, Katia ; Mazenq, Laurent ; Bouchriha, Fouad ; Rydberg, Anders ; Plana, Robert

  • Author_Institution
    Dept. of Eng. Sci., Uppsala Univ., Sweden
  • Volume
    15
  • Issue
    10
  • fYear
    2005
  • Firstpage
    627
  • Lastpage
    629
  • Abstract
    This letter addresses the integration of a 24-GHz inverted-F antenna on a low resistivity silicon substrate, using micromachining post-processing techniques compatible with commercial Si/SiGe active device processes. By suspending the radiator on a 2.4mm2 large polymer membrane an on-chip antenna with -0.7 dBi gain has been realized.
  • Keywords
    elemental semiconductors; micromachining; microwave antennas; silicon; 24 GHz; inverted F antennas; low resistivity silicon substrates; micromachining; microwave antennas; Biomembranes; Conductivity; Dielectric losses; Dielectric substrates; Frequency; Germanium silicon alloys; Micromachining; Mobile antennas; Radar antennas; Silicon germanium; Antennas; micromachining; silicon;
  • fLanguage
    English
  • Journal_Title
    Microwave and Wireless Components Letters, IEEE
  • Publisher
    ieee
  • ISSN
    1531-1309
  • Type

    jour

  • DOI
    10.1109/LMWC.2005.856693
  • Filename
    1512202
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=1175902