Title :
Soft-magnetic rotational microwings in an alternating magnetic field applicable to microflight mechanisms
Author :
Miki, Norihisa ; Shimoyama, Isao
Author_Institution :
Dept. of Mechano-Informatics, Univ. of Tokyo, Japan
fDate :
4/1/2003 12:00:00 AM
Abstract :
This paper presents microsized soft-magnetic rotational wings in an alternating magnetic field. The wireless power supply as well as control of magnetic microwings are readily applicable to microflight mechanisms. As a magnetic material, soft magnetic material, such as nickel-iron alloy was deposited via electroplating, which is a well-developed MEMS batch process. The magnetization of the soft-magnetic device, however, changes its direction and magnitude during rotation, where the shape magnetic anisotropy of the wings plays a vital role. The principle of the wing rotation in an alternating magnetic field was elucidated theoretically and showed favorable agreement with the experimental results with large-sized models. The aerodynamic performances of soft magnetic rotational wings were evaluated, including the microrotational wings 165 μg in weight consisting of 0.9-mm-long magnetic wings made of electroplated nickel-iron alloy and an axis of wing rotation made of a sharpened glass tube. The micromagnetic rotational wings presented here were utilized for microflight mechanisms, which achieved successful flights.
Keywords :
aerodynamics; electromagnetic actuators; electroplating; induced anisotropy (magnetic); iron alloys; magnetic fields; magnetic forces; microactuators; nickel alloys; rotating bodies; rotation; soft magnetic materials; torque; MEMS batch process; Ni-Fe; Ni-Fe alloy; aerodynamic performances; alternating magnetic field; electroplating; microflight mechanisms; micromagnetic rotational wings; microsized rotational wings; shape magnetic anisotropy; soft-magnetic rotational microwings; wireless power supply; Magnetic anisotropy; Magnetic fields; Magnetic materials; Magnetization; Micromagnetics; Micromechanical devices; Nickel alloys; Perpendicular magnetic anisotropy; Power supplies; Soft magnetic materials;
Journal_Title :
Microelectromechanical Systems, Journal of
DOI :
10.1109/JMEMS.2003.809966