Title :
A novel high-speed polymeric EO Modulator based on a combination of a microring resonator and an MZI
Author :
Leinse, A. ; Diemeer, M.B.J. ; Rousseau, A. ; Driessen, A.
Author_Institution :
Integrated Opt. MicroSyst. Group, Univ. of Twente, Enschede, Netherlands
Abstract :
A Mach-Zehnder interferometer with an electrooptic polymer mircroring resonator adjacent to one of its branches is realized in a polymer layer stack. The microresonator is defined by reactive ion etching in the nonlinear PMMA-DR1 polymer and waveguide definition is done without etching, by using a negative photoresist (SU8) as waveguide layer. Electrooptic coefficients of 10 pm/V and modulation frequencies of 1 GHz were measured.
Keywords :
Mach-Zehnder interferometers; electro-optical modulation; high-speed optical techniques; integrated optics; micro-optics; microcavities; nonlinear optics; optical polymers; optical resonators; optical waveguides; photoresists; sputter etching; 1 GHz; EO modulator; Mach-Zehnder interferometer; electrooptic coefficients; electrooptic resonator; high-speed modulator; microresonator; microring resonator; negative photoresist; nonlinear PMMA-DR1 polymer; polymer resonator; polymeric modulator; reactive ion etching; waveguide layer; Electrooptic modulators; Fiber nonlinear optics; High speed optical techniques; Integrated optics; Nonlinear optics; Optical devices; Optical modulation; Optical resonators; Optical waveguides; Polymers; Electrooptic modulation; integrated optics; microresonators; optical polymers;
Journal_Title :
Photonics Technology Letters, IEEE
DOI :
10.1109/LPT.2005.854354
