A novel high-speed polymeric EO Modulator based on a combination of a microring resonator and an MZI

Author

Leinse, A. ; Diemeer, M.B.J. ; Rousseau, A. ; Driessen, A.

Author_Institution

Integrated Opt. MicroSyst. Group, Univ. of Twente, Enschede, Netherlands

Volume

17

Issue

10

fYear

2005

Firstpage

2074

Lastpage

2076

Abstract

A Mach-Zehnder interferometer with an electrooptic polymer mircroring resonator adjacent to one of its branches is realized in a polymer layer stack. The microresonator is defined by reactive ion etching in the nonlinear PMMA-DR1 polymer and waveguide definition is done without etching, by using a negative photoresist (SU8) as waveguide layer. Electrooptic coefficients of 10 pm/V and modulation frequencies of 1 GHz were measured.

Keywords

Mach-Zehnder interferometers; electro-optical modulation; high-speed optical techniques; integrated optics; micro-optics; microcavities; nonlinear optics; optical polymers; optical resonators; optical waveguides; photoresists; sputter etching; 1 GHz; EO modulator; Mach-Zehnder interferometer; electrooptic coefficients; electrooptic resonator; high-speed modulator; microresonator; microring resonator; negative photoresist; nonlinear PMMA-DR1 polymer; polymer resonator; polymeric modulator; reactive ion etching; waveguide layer; Electrooptic modulators; Fiber nonlinear optics; High speed optical techniques; Integrated optics; Nonlinear optics; Optical devices; Optical modulation; Optical resonators; Optical waveguides; Polymers; Electrooptic modulation; integrated optics; microresonators; optical polymers;

fLanguage

English

Journal_Title

Photonics Technology Letters, IEEE

Publisher

ieee

ISSN

1041-1135

Type

jour

DOI

10.1109/LPT.2005.854354

Filename

1512277