A Si-based tunable narrow-band flat-top filter with multiple-step-type Fabry-Perot cavity structure

Author

Zuo, Y.H. ; Mao, R.W. ; Zheng, Y.Y. ; Shi, X. ; Zhao, L. ; Shi, W.H. ; Cheng, B.W. ; Yu, J.Z. ; Wang, Q.M.

Author_Institution

State Key Lab. on Integrated Optoelectronics, Chinese Acad. of Sci., Beijing, China

Volume

17

Issue

10

fYear

2005

Firstpage

2134

Lastpage

2136

Abstract

In the optical network, the quick and accurate alignment with wavelength is an important issue during the channel detection. At this point, a filter having flat-top response characteristic is an effective solution. Based on multiple-step-type Fabry-Perot cavity structure, a novel all-Si-based thermooptical tunable flat-top filter with narrow-band has been fabricated, using our patent silicon-on-reflector bonding technology. The device demonstrated a 1-dB flat-top width of 1 nm, 3-dB band of 3 nm, free spectra range of 8 nm, and the tuning range of 4.6 nm was obtained under the applied voltage of 4 V.

Keywords

Fabry-Perot resonators; bonding processes; elemental semiconductors; optical fabrication; optical filters; optical tuning; silicon; thermo-optical devices; 4 V; Si; Si-based tunable narrow-band flat-top filter; channel detection; multiple-step-type Fabry-Perot cavity structure; silicon-on-reflector bonding; thermooptical filter; Arrayed waveguide gratings; Band pass filters; Fiber gratings; Narrowband; Optical device fabrication; Optical fiber networks; Optical filters; Optical waveguides; Passband; Wafer bonding; Fabry–PÉrot; flat-top filter; step-type; thermal-optical effect;

fLanguage

English

Journal_Title

Photonics Technology Letters, IEEE

Publisher

ieee

ISSN

1041-1135

Type

jour

DOI

10.1109/LPT.2005.854421

Filename

1512297