Title :
Selected topics in RF coplanar probing
Author :
Wartenberg, Scott A.
Author_Institution :
RF Micro Devices, Greensboro, NC, USA
fDate :
4/1/2003 12:00:00 AM
Abstract :
The RF coplanar probe is a popular tool for launching high-frequency signals onto and off of a wafer. Physically contacting the die, it establishes a crucial link between the test system and wafer. Their proper use permits a higher degree of measurement accuracy compared to test fixturing. To augment the reader´s understanding, this tutorial reviews selected issues related to the design, construction, characterization, selection, calibration, and repeatability of RF on-wafer coplanar probes.
Keywords :
MMIC; calibration; coplanar waveguide components; integrated circuit testing; probes; MMICs; RF coplanar probing; RFICs; calibration; high-frequency signals; repeatability; test system; Coaxial cables; Coplanar waveguides; Design automation; Fixtures; Integrated circuit measurements; Probes; Radio frequency; Radiofrequency integrated circuits; Semiconductor device modeling; System testing;
Journal_Title :
Microwave Theory and Techniques, IEEE Transactions on
DOI :
10.1109/TMTT.2003.809184
