DocumentCode
1178863
Title
Engineering a device for electron-beam probing
Author
Lee, William T.
Author_Institution
Schlumberger Technol. ATE, San Jose, CA, USA
Volume
6
Issue
3
fYear
1989
fDate
6/1/1989 12:00:00 AM
Firstpage
36
Lastpage
42
Abstract
The principles of electron-beam probing for diagnostic work are described. Guidelines are presented to help users of electron-beam probe stations optimize their IC design and manufacturing procedures for electron-beam probing. The guidelines cover: observability, maintaining line of sight, direct versus indirect measuring, using test points, accuracy, improving signal-to-noise ratio, reducing crosstalk, maintaining a consistent environment, usability, reducing acquisition time, packaging, and linking with CAD/CAE databases.<>
Keywords
electron probes; CAD/CAE databases; IC design; crosstalk; direct; electron-beam probing; indirect measuring; maintaining line of sight; manufacturing procedures; observability; packaging; signal-to-noise ratio; Crosstalk; Design optimization; Guidelines; Maintenance engineering; Manufacturing; Observability; Probes; Signal to noise ratio; Testing; Time measurement;
fLanguage
English
Journal_Title
Design & Test of Computers, IEEE
Publisher
ieee
ISSN
0740-7475
Type
jour
DOI
10.1109/54.32411
Filename
32411
Link To Document