Author_Institution :
Schlumberger Technol. ATE, San Jose, CA, USA
Abstract :
The principles of electron-beam probing for diagnostic work are described. Guidelines are presented to help users of electron-beam probe stations optimize their IC design and manufacturing procedures for electron-beam probing. The guidelines cover: observability, maintaining line of sight, direct versus indirect measuring, using test points, accuracy, improving signal-to-noise ratio, reducing crosstalk, maintaining a consistent environment, usability, reducing acquisition time, packaging, and linking with CAD/CAE databases.<>
Keywords :
electron probes; CAD/CAE databases; IC design; crosstalk; direct; electron-beam probing; indirect measuring; maintaining line of sight; manufacturing procedures; observability; packaging; signal-to-noise ratio; Crosstalk; Design optimization; Guidelines; Maintenance engineering; Manufacturing; Observability; Probes; Signal to noise ratio; Testing; Time measurement;
