• DocumentCode
    1179433
  • Title

    Fabrication of submillimeter-radius optical waveguide bends with anisotropic and isotropic wet chemical etchants

  • Author

    Seto, Myron ; Deri, R.J. ; Yi-Yan, Alfredo ; Colas, Etienne ; Tomlinson, W. John ; Bhat, R. ; Shahar, Arie

  • Author_Institution
    Bellcore, Red Bank, NJ, USA
  • Volume
    8
  • Issue
    2
  • fYear
    1990
  • fDate
    2/1/1990 12:00:00 AM
  • Firstpage
    264
  • Lastpage
    270
  • Abstract
    Wet chemical etchants suitable for making GaAs/AlGaAs single-mode optical waveguide bends with radii as low as 300 μm for excess bend losses of 1 dB/90° and propagation losses as low as 1 dB/cm at λ=1.5 μm are described. Additional bend losses due to modal mismatch resulting from etchant anisotropy are investigated, and it is shown that in many cases such anisotropy does not limit bend performance
  • Keywords
    III-V semiconductors; aluminium compounds; etching; gallium arsenide; optical losses; optical waveguides; optical workshop techniques; 1 dB; 1.5 micron; 300 micron; AlGaAs-GaAs; III-V semiconductors; excess bend losses; fabrication; modal mismatch; propagation losses; single-mode optical waveguide; submillimeter-radius optical waveguide bends; wet chemical etchants; Anisotropic magnetoresistance; Chemicals; Gallium arsenide; Geometrical optics; Optical device fabrication; Optical losses; Optical waveguides; Performance loss; Propagation losses; Wet etching;
  • fLanguage
    English
  • Journal_Title
    Lightwave Technology, Journal of
  • Publisher
    ieee
  • ISSN
    0733-8724
  • Type

    jour

  • DOI
    10.1109/50.47881
  • Filename
    47881