DocumentCode
1179433
Title
Fabrication of submillimeter-radius optical waveguide bends with anisotropic and isotropic wet chemical etchants
Author
Seto, Myron ; Deri, R.J. ; Yi-Yan, Alfredo ; Colas, Etienne ; Tomlinson, W. John ; Bhat, R. ; Shahar, Arie
Author_Institution
Bellcore, Red Bank, NJ, USA
Volume
8
Issue
2
fYear
1990
fDate
2/1/1990 12:00:00 AM
Firstpage
264
Lastpage
270
Abstract
Wet chemical etchants suitable for making GaAs/AlGaAs single-mode optical waveguide bends with radii as low as 300 μm for excess bend losses of 1 dB/90° and propagation losses as low as 1 dB/cm at λ=1.5 μm are described. Additional bend losses due to modal mismatch resulting from etchant anisotropy are investigated, and it is shown that in many cases such anisotropy does not limit bend performance
Keywords
III-V semiconductors; aluminium compounds; etching; gallium arsenide; optical losses; optical waveguides; optical workshop techniques; 1 dB; 1.5 micron; 300 micron; AlGaAs-GaAs; III-V semiconductors; excess bend losses; fabrication; modal mismatch; propagation losses; single-mode optical waveguide; submillimeter-radius optical waveguide bends; wet chemical etchants; Anisotropic magnetoresistance; Chemicals; Gallium arsenide; Geometrical optics; Optical device fabrication; Optical losses; Optical waveguides; Performance loss; Propagation losses; Wet etching;
fLanguage
English
Journal_Title
Lightwave Technology, Journal of
Publisher
ieee
ISSN
0733-8724
Type
jour
DOI
10.1109/50.47881
Filename
47881
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