DocumentCode
1179683
Title
Design, fabrication, and characterization of striped channel HEMT´s
Author
Bollaert, Sylvain ; Legris, P. ; Delos, Elisabeth ; Cappy, Alain ; Debray, P. ; Blanchet, J.
Author_Institution
IEMN-DHS, Univ. des Sci. et Tech. de Lille Flandres Artois, Villeneuve d´´Ascq, France
Volume
41
Issue
10
fYear
1994
fDate
10/1/1994 12:00:00 AM
Firstpage
1716
Lastpage
1724
Abstract
A theoretical and experimental study of striped channel HEMT´s is presented in this paper. The source to drain region of striped channel HEMT´s is divided into a number of narrow conducting channels. Hence, the control of the charges by the Schottky gate is two-dimensional, which improves the transconductance value. Striped channel HEMT´s have been successfully realized and characterized. The experimental results agree well with the theoretical ones. The structure of an optimized device is then proposed
Keywords
Schottky gate field effect transistors; high electron mobility transistors; Schottky gate; design; fabrication; optimized device; striped channel HEMTs; transconductance; two-dimensional charge control; Electrons; FETs; Fabrication; Gallium arsenide; HEMTs; Physics; Semiconductor device modeling; Topology; Transconductance; Wires;
fLanguage
English
Journal_Title
Electron Devices, IEEE Transactions on
Publisher
ieee
ISSN
0018-9383
Type
jour
DOI
10.1109/16.324579
Filename
324579
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