Integration of thin film optoelectronic devices onto micromachined movable platforms

Author

Wilkinson, Scott T. ; Kim, Young W. ; Jokerst, Nan M. ; Allen, Mark G.

Author_Institution

Microelectron. Res. Center, Georgia Inst. of Technol., Atlanta, GA, USA

Volume

6

Issue

9

fYear

1994

Firstpage

1115

Lastpage

1118

Abstract

The integration of a thin film optoelectronic device onto a micromachined movable platform is reported in this letter. This micro-opto-mechanical system, consisting of a thin film AlGaAs/GaAs double heterostructure p-i-n detector integrated onto a polyimide micromachined platform on silicon, has applications which range from fiber optic coupling to sensors. Fiber optic coupling is demonstrated using a stationary fiber positioned above the thin film detector. By applying a voltage between the platform and actuation strips, the platform moves and a change in fiber to detector coupling is observed.<>

Keywords

III-V semiconductors; aluminium compounds; electro-optical devices; gallium arsenide; integrated optics; integrated optoelectronics; micromechanical devices; optical films; optical sensors; p-i-n photodiodes; photodetectors; AlGaAs-GaAs; AlGaAs/GaAs double heterostructure p-i-n detector; actuation strips; fiber optic coupling; fiber to detector coupling; micro-opto-mechanical system; micromachined movable platforms; polyimide micromachined platform; sensors; thin film; thin film optoelectronic devices; Gallium arsenide; Optical coupling; Optical fiber sensors; Optical fibers; Optoelectronic devices; PIN photodiodes; Polyimides; Semiconductor thin films; Thin film devices; Thin film sensors;

fLanguage

English

Journal_Title

Photonics Technology Letters, IEEE

Publisher

ieee

ISSN

1041-1135

Type

jour

DOI

10.1109/68.324685

Filename

324685