Title :
Three-dimensional nanostructuring with femtosecond laser pulses
Author :
Korte, Frank ; Koch, Jürgen ; Serbin, Jesper ; Ovsianikov, Aleksandr ; Chichkov, Boris N.
Author_Institution :
Laser Zentrum Hannover e. V., Germany
Abstract :
The development of simple laser-based technologies for the fabrication of complicated three-dimensional (3-D) microstructures with a structure size down to 100 nm is reported. These technologies are based on nonlinear multiphoton laser-matter interaction processes allowing to overcome the diffraction limit and to fabricate 3-D structures inside transparent materials. Examples on nanostructuring of metals, dielectrics, and polymers are presented.
Keywords :
high-speed optical techniques; laser beams; laser materials processing; multiphoton processes; nanotechnology; complicated three-dimensional microstructures fabrication; dielectrics nanostructuring; diffraction limit; femtosecond laser pulse; metal nanostructuring; nonlinear multiphoton laser-matter interaction process; polymer nanostructuring; three-dimensional nanostructure; transparent material; Dielectric materials; Laser ablation; Microstructure; Nanostructured materials; Optical device fabrication; Optical materials; Optical pulses; Polymers; Surface emitting lasers; Ultrafast optics; Femtosecond lasers; material processing; three-dimensional (3-D) nanostructuring;
Journal_Title :
Nanotechnology, IEEE Transactions on
DOI :
10.1109/TNANO.2004.834189
