DocumentCode :
1181586
Title :
Ridge waveguides and electro-optical switches in LiNbO3 fabricated by ion-bombardment-enhanced etching
Author :
Kawabe, M. ; Hirata, S. ; Namba, S.
Volume :
26
Issue :
12
fYear :
1979
fDate :
12/1/1979 12:00:00 AM
Firstpage :
1109
Lastpage :
1113
Abstract :
Narrow ridge waveguides with 
m width have been fabricated in Ti-diffused 
by ion-bombardment-enhanced etching and the intensity modulation by switching the waveguide from guided mode to radiation mode through electro-optic effect has been demonstrated. The extinction coefficient of 
was obtained at the applied voltage of 
10 V.
m width have been fabricated in Ti-diffused by ion-bombardment-enhanced etching and the intensity modulation by switching the waveguide from guided mode to radiation mode through electro-optic effect has been demonstrated. The extinction coefficient of was obtained at the applied voltage of 10 V.Keywords :
Electrooptic switches; Ion-beam applications; Lithium alloys/compounds, devices; Modulators and switches; Optical strip waveguides; Atomic layer deposition; Electrooptic modulators; Electrooptical waveguides; Etching; Intensity modulation; Optical modulation; Optical waveguides; Particle beam optics; Slabs; Switches;
fLanguage :
English
Journal_Title :
Circuits and Systems, IEEE Transactions on
Publisher :
ieee
ISSN :
0098-4094
Type :
jour
DOI :
10.1109/TCS.1979.1084608
Filename :
1084608
Link To Document :
