DocumentCode
1181761
Title
Scaling Limitations for Flexural Beams Used in Electromechanical Devices
Author
Lee, Donovan ; Osabe, Taro ; Liu, Tsu-Jae King
Author_Institution
Dept. of Electr. Eng. & Comput. Sci., Univ. of California, Berkeley, CA, USA
Volume
56
Issue
4
fYear
2009
fDate
4/1/2009 12:00:00 AM
Firstpage
688
Lastpage
691
Abstract
Limitations for the miniaturization of flexural beams used in electromechanical devices are examined using the numerical analysis of the Euler-Bernoulli equation. The utilization of structural materials with high strain limit, in conjunction with innovations in processes and structures, will be needed to scale nanoelectromechanical systems beam lengths into the sub-100 nanometer regime.
Keywords
beams (structures); flexible structures; nanoelectromechanical devices; Euler-Bernoulli equation; flexural beams scaling limitations; high strain limit; nanoelectromechanical systems beam lengths; numerical analysis; Capacitive sensors; Digital relays; Electromechanical devices; Leakage current; Manufacturing; Nanoelectromechanical systems; Numerical analysis; Power system relaying; Shape; Tunneling; Microelectromechanical systems; nanoelectromechanical systems; relays; scaling;
fLanguage
English
Journal_Title
Electron Devices, IEEE Transactions on
Publisher
ieee
ISSN
0018-9383
Type
jour
DOI
10.1109/TED.2009.2014190
Filename
4796329
Link To Document