RF MEMS waveguide switch

This paper presents a novel concept for an RF microelectromechanical systems (MEMS) waveguide switch. The proposed switch employs a ridge waveguide integrated with MEMS rotary actuators based on a thermal plastic deformation approach. The switch promises to be useful in high-power applications, as well as in millimeter-wave applications. Two switch implementations are presented: one with a waveguide interface and the other with a coplanar-waveguide interface for wide-band applications. Electromagnetic simulation results are presented showing the ultimate potential of the proposed concept. Both switch implementations have been fabricated and tested. The achievable measured results are very encouraging and demonstrate the feasibility of such novel types of MEMS switches. The power-handling capability of the switch is also investigated both theoretically and experimentally.