• DocumentCode
    1185229
  • Title

    ZnO Nanowire-Based Oxygen Gas Sensor

  • Author

    Lu, Chien-Yuan ; Chang, Sheng-Po ; Chang, Shoou-Jinn ; Hsueh, Ting-Jen ; Hsu, Cheng-Liang ; Chiou, Yu-Zung ; Chen, I-Cherng

  • Author_Institution
    Dept. of Electr. Eng., Nat. Cheng Kung Univ., Tainan
  • Volume
    9
  • Issue
    4
  • fYear
    2009
  • fDate
    4/1/2009 12:00:00 AM
  • Firstpage
    485
  • Lastpage
    489
  • Abstract
    We report the growth of vertically well-aligned ZnO nanowires on ZnO:Ga/glass templates and the fabrication of resistive ZnO nanowire-based oxygen gas sensor. It was found that the ZnO nanowires are grown preferred oriented in the (002) direction with a small X-ray diffraction full-width-half-maximum. From high resolution transmission electron microscopy, scanning electron microscopy and micro-Raman measurements, it was found that the ZnO nanowires prepared in this study are single crystalline with good crystal quality. It was also found that measured sample resistance increased logarithmically as the oxygen gas pressure in the chamber was increased. Such a relationship suggests that the device is potentially useful for resistive oxygen gas sensing at room temperature.
  • Keywords
    X-ray diffraction; gas sensors; nanowires; oxygen; scanning electron microscopy; transmission electron microscopy; zinc compounds; X-ray diffraction; ZnO; glass templates; micro-Raman measurements; resistive nanowire-based oxygen gas sensor; scanning electron microscopy; transmission electron microscopy; vertically well-aligned nanowires; Crystallization; Electrical resistance measurement; Fabrication; Gas detectors; Glass; Nanowires; Oxygen; Scanning electron microscopy; Transmission electron microscopy; Zinc oxide; Nanowires; ZnO; oxygen gas sensor;
  • fLanguage
    English
  • Journal_Title
    Sensors Journal, IEEE
  • Publisher
    ieee
  • ISSN
    1530-437X
  • Type

    jour

  • DOI
    10.1109/JSEN.2009.2014425
  • Filename
    4797922