Title :
Silicon micromachining for micro-replication technologies
Author :
Klein, Reinhard ; Neyer, A.
Author_Institution :
Lehrstuhl fur Hochfrequenztech., Dortmund Univ.
fDate :
9/29/1994 12:00:00 AM
Abstract :
Silicon micromachining is applied to the fabrication of highly precise mould inserts to be used in the micro-replication of polymer waveguide components with integrated fibre alignment grooves. The waveguide structures with rectangular cross-section are realised by an anisotropic RIE process, whereas the integrated passive fibre alignment grooves are formed by anisotropic wet chemical etching. Two processes (a two-mask process and a selfaligned one-mask process) are described for the accurate alignment of waveguide structures and fibre alignment grooves
Keywords :
etching; integrated optics; machining; optical fibre fabrication; optical polymers; optical waveguide components; optical workshop techniques; silicon; sputtering; Si; anisotropic RIE; anisotropic wet chemical etching; fabrication; integrated passive fibre alignment grooves; micro-replication technologies; mould inserts; polymer waveguide components; rectangular cross-section; selfaligned one-mask process; silicon micromachining; two-mask process;
Journal_Title :
Electronics Letters
DOI :
10.1049/el:19941121
