Title :
Effect of electrode geometry on performance of an EHD thin-film evaporator
Author :
Moghaddam, Saeed ; Ohadi, Michael M.
Author_Institution :
Coll. Park, ATEC Inc., College Park, MD, USA
Abstract :
This paper presents details of an optimization process of electrode geometry for an electrohydrodynamically (EHD) driven thin-film evaporator. The operation principle of the device is based on the action of the EHD force on the molecules of a dielectric liquid in a highly convergent electric field. The force starts at the end of a pair of electrodes, where the electric field changes from zero far from the electrodes to a finite value in between the electrodes. This force drives the liquid up into the spacing between the electrodes. The electrodes in this study were deposited thinly on a SiO2/Si wafer, so the liquid could be held within micrometers of thickness over the surface. Since the performance of the device in removing heat from the surface is a function of its pumping head and consequently its electrode geometry, the performances of different electrodes were evaluated by testing twelve sets of electrode pairs with different geometries. Then the optimum electrode design was incorporated into the design of a large size (32×32 mm2) EHD thin-film evaporator. The device was fabricated, and its pumping and heat transfer performances were tested. A pumping head equal to the full height of the electrodes and a heat transfer coefficient of 1.9 W/cm2.°C was achieved using HFE-7100 liquid.
Keywords :
electrohydrodynamics; microelectrodes; microfluidics; micropumps; optimisation; polarisation; vacuum deposition; EHD thin-film evaporator; SiO2-Si; dielectric liquid; electric field effects; electrode geometry optimization; electrohydrodynamic driven thin-film evaporator; heat transfer coefficient; microfluidic MEMS; optimum electrode design; Dielectric thin films; Electrodes; Electronics cooling; Geometry; Heat pumps; Heat transfer; Performance evaluation; Temperature; Testing; Transistors; Electrohydrodynamic (EHD); electronic cooling; microfluidic MEMS; polarization; thin-film evaporator;
Journal_Title :
Microelectromechanical Systems, Journal of
DOI :
10.1109/JMEMS.2005.851812