DocumentCode :
118581
Title :
Numerical analysis on MUF process for flip chip packaging
Author :
Xiyun Cheng ; Qian Wang ; Lin Tan ; Guanhua Li ; Yu Chen ; Jian Cai
Author_Institution :
Inst. of Microelectron., Tsinghua Univ., Beijing, China
fYear :
2014
fDate :
12-15 Aug. 2014
Firstpage :
703
Lastpage :
710
Abstract :
With merits like high I/O density, superior electrical and thermal performance, and small form factor, flip chip has become more and more widely used in electronic packages. Although the flip chip packaging process has been fairly improved, the conventional CUF (Capillary Underfill) process is a bottleneck that results in lower productivity and higher cost. MUF (Molded Underfill) process offers an alternative solution with advantages such as simplification of process, reduction of material cost and higher productivity. However, the extremely narrow gap between substrate and die makes it a big challenge to get optimal MUF material set and appropriate process conditions to cope with the serious void trapping issue. Besides, the process-induced warpage is also a problem that affects yield and reliability. In this paper, the MUF process of a flip chip package has been studied using numerical analysis method. The cure-kinetic, rheological and chemical shrinkage properties of MUF compound were measured by DSC (Differential Scanning Calorimeter), DMA (Dynamic Mechanical Analyzer) and universal testing machine, respectively. A global model and a sectional model were developed for MUF injection analysis to simulate the melt front advancement and estimate possible mold void distribution. Warpage analysis considering both chemical shrinkage and CTE (Coefficient of Thermal Expansion) mismatch was performed afterwards. The MUF injection analysis showed mold void generated near the center of underfill area. The warpage analysis indicated that stresses caused by chemical shrinkage and CTE mismatch acted in opposite directions, and the overall warpage was dominated by CTE mismatch. Simulation results of injection analysis were validated by short shot experiment and SAM (Scanning Acoustic Microscopy) test, respectively, and the warpage prediction was verified by measurement data. Finally, MUF process setting with four parameters was optimized based on the established numerical mode- s, three indicators of mold quality had been improved by 9.10%, 8.95% and 20.6% respectively.
Keywords :
acoustic microscopy; differential scanning calorimetry; flip-chip devices; numerical analysis; thermal expansion; voids (solid); CTE; DMA; DSC; MUF injection analysis; MUF process; SAM test; chemical shrinkage properties; coefficient of thermal expansion; cure-kinetic; differential scanning calorimeter; dynamic mechanical analyzer; electrical performance; electronic packages; flip chip packaging process; global model; high I/O density; material cost; measurement data; mold void distribution; molded underfill process; numerical analysis method; process-induced warpage; rheological properties; scanning acoustic microscopy; sectional model; small form factor; thermal performance; universal testing machine; void trapping; warpage analysis; Compounds; Fitting; Flip-chip devices; Numerical models; Strips; Viscosity; Flip Chip; Mold Void; Molded Underfill (MUF); Numerical Analysis; Warpage;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Electronic Packaging Technology (ICEPT), 2014 15th International Conference on
Conference_Location :
Chengdu
Type :
conf
DOI :
10.1109/ICEPT.2014.6922750
Filename :
6922750
Link To Document :
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