• DocumentCode
    1185928
  • Title

    Fundamentals of microfabrication, the science of miniaturization, 2nd edition [Book Review]

  • Author

    Kauzlarick, D.

  • Author_Institution
    EET
  • Volume
    22
  • Issue
    2
  • fYear
    2003
  • Firstpage
    109
  • Lastpage
    111
  • Keywords
    Additives; Biological materials; Biomedical engineering; Book reviews; Cyclic redundancy check; Engineering in medicine and biology; Lithography; Micromachining; Power engineering and energy; Sensor systems;
  • fLanguage
    English
  • Journal_Title
    Engineering in Medicine and Biology Magazine, IEEE
  • Publisher
    ieee
  • ISSN
    0739-5175
  • Type

    jour

  • DOI
    10.1109/MEMB.2003.1195708
  • Filename
    1195708
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=1185928