• DocumentCode
    118753
  • Title

    Effect of magnetism of specimen on energy spectrum analysis

  • Author

    Yan Yao ; Shengxiang Bao ; Zheng Yuwei

  • Author_Institution
    State Key Lab. of Electron. Thin Films & Integrated Devices, Univ. of Electron. Sci. & Technol. of China, Chengdu, China
  • fYear
    2014
  • fDate
    12-15 Aug. 2014
  • Firstpage
    996
  • Lastpage
    1000
  • Abstract
    With This paper studies the effect to the result of energy spectrum analysis by the magnetic specimen. The electron beam and the interaction between electronics and solid in magnetic field had been discussed, and the escape depth of two elements´ characteristic X-ray had been calculated. From the above that the mechanism and principle of this specimen´s energy spectrum analysis result of error had been confirmed, and coincides with the experimental result. The study result provides an important reference for the analysis worker.
  • Keywords
    X-ray analysis; electron beams; magnetic devices; magnetic fields; magnetic materials; spectral analysis; characteristic X-ray; electron beam; energy spectrum analysis; escape depth; magnetic field; magnetic material; magnetic specimen effect; Electron beams; Iron; Magnetic analysis; Magnetic fields; Magnetic flux; Scanning electron microscopy; Spectral analysis; deviation mechanism; energy spectrum analysis; magnetic specimen;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Electronic Packaging Technology (ICEPT), 2014 15th International Conference on
  • Conference_Location
    Chengdu
  • Type

    conf

  • DOI
    10.1109/ICEPT.2014.6922815
  • Filename
    6922815