Title :
Low-loss channel waveguide on high-energy-beam sensitive glass
Author :
Srisanit, Namkhun ; Wang, Michael R.
Author_Institution :
Dept. of Electr. & Comput. Eng., Univ. of Miami, Coral Gables, FL, USA
fDate :
5/1/2003 12:00:00 AM
Abstract :
We report on the fabrication of optical channel waveguide on a high-energy-beam sensitive glass using a maskless nonphotolithographic processing technique. Laser direct writing and one-step chemical etching result in high quality channel waveguide with a propagation loss of about -0.27 dB/cm at 1550-nm wavelength.
Keywords :
borosilicate glasses; etching; integrated optics; laser beam etching; optical fabrication; optical glass; optical losses; optical waveguides; 1550 nm; ZnO-B/sub 2/O/sub 3/-SiO/sub 2/; high quality channel waveguide; high-energy-beam sensitive glass; integrated optics; laser direct writing; low-loss channel waveguide; maskless nonphotolithographic processing; one-step chemical etching; propagation loss; zinc borosilicate glass body; Chemical lasers; Etching; Glass; Optical device fabrication; Optical sensors; Optical waveguides; Particle beam optics; Silver; Waveguide lasers; Writing;
Journal_Title :
Photonics Technology Letters, IEEE
DOI :
10.1109/LPT.2003.809945
