Title :
Thle monopole-a new instrument for measuring partial pressures
Author :
Hudson, J.B. ; Watters, R.L.
Abstract :
Design parameters appropriate to the construction of a monopole type mass spectrometer suitable for use as an ultra-high vacuum partial pressure analyzer are developed and elaborated. Performance results of an instrument built to these parameters are presented. Results indicate a usable mass range of 300 amu, with unit resolution over the whole range. Ultimate sensitivity is in the 10-14 Torr partial pressure range.
Keywords :
Electrodes; Equations; Filters; H infinity control; Instruments; Magnetic analysis; Magnetic separation; Mass spectroscopy; Pressure measurement; Stability;
Journal_Title :
Instrumentation and Measurement, IEEE Transactions on
DOI :
10.1109/TIM.1966.4313516