An Analytical Solution to Circular Touch Mode Capacitor

Author

Daigle, Maxime ; Corcos, Jacques ; Wu, Ke

Author_Institution

Poly-Grames Res. Center, Ecole Polytech. de Montreal, Que.

Volume

7

Issue

4

fYear

2007

fDate

4/1/2007 12:00:00 AM

Firstpage

502

Lastpage

505

Abstract

In this paper, a simple but accurate analytical solution is presented to model the flexion of a circular diaphragm with clamped edges under an uniform load. The touch down effect and the evolution of touch radius are considered in this model, making it useful for touch down capacitor devices such as pressure sensors. This model is then compared to results obtained from Coventor, a finite elements analysis program designed for microelectromechanical systems

Keywords

capacitive sensors; capacitors; diaphragms; finite element analysis; microsensors; pressure sensors; Coventor; MEMS; capacitive sensing; circular diaphragm; circular touch mode capacitor; clamped edges; finite element analysis; flexion model; microelectromechanical systems; pressure sensors; touch down effect; touch radius evolution; uniform load; Biosensors; Capacitive sensors; Capacitors; Finite element methods; Linearity; Microelectromechanical systems; Tactile sensors; Temperature dependence; Temperature sensors; Young´s modulus; Capacitive sensing; circular diaphragm; pressure sensor; touch mode;

fLanguage

English

Journal_Title

Sensors Journal, IEEE

Publisher

ieee

ISSN

1530-437X

Type

jour

DOI

10.1109/JSEN.2007.891996

Filename

4114327