Title :
Good news: you can patch active plasma and collisionless sheath
Author :
Godyak, Valery ; Sternberg, Natalia
Author_Institution :
Osram Sylvania Inc., Beverly, MA, USA
fDate :
4/1/2003 12:00:00 AM
Abstract :
It is shown that the proof of physical inconsistency of the discrete plasma-sheath model with a continuous electric field is based on mathematical error in solving the basic sheath equation.
Keywords :
plasma boundary layers; plasma sheaths; plasma theory; DC discharges; RF discharges; active plasma; asymptotic plasma; boundary condition; bounded plasma-sheath systems; collisionless sheath; continuous electric field; discrete plasma-sheath hydrodynamic model; disjunction; electrode phenomena; electron densities; electrostatic plasma probes; ion densities; physical inconsistency; plasma boundary; plasma sheath; plasma-sheath edge; plasma-sheath interface; quasi-neutral plasma; sheath equation; singularity; Boundary conditions; Discharges; Electrostatics; Equations; Mathematical model; Plasma applications; Plasma density; Plasma properties; Plasma sheaths; Plasma temperature;
Journal_Title :
Plasma Science, IEEE Transactions on
DOI :
10.1109/TPS.2003.809282
