DocumentCode :
119168
Title :
Reactively sputtered PMN-PT thin films for electrocaloric applications
Author :
Kleiner, Alexander ; Suchaneck, G. ; Eydam, A. ; Gerlach, G. ; Liu, L.
Author_Institution :
Solid State Electron. Lab., Tech. Univ. Dresden, Dresden, Germany
fYear :
2014
fDate :
12-16 May 2014
Firstpage :
1
Lastpage :
4
Abstract :
In this work, lead magnesium niobate-lead titanate (1-x)Pb(Mg1/3Nb2/3)O3-xPbTiO3(PMN-PT) thin films with PT-fractions of 6.5 to 20% were fabricated on Pt(111)-coated Si wafers for the first time by multitarget reactive sputtering using four metallic targets (Pb, Mg, Nb, Ti).
Keywords :
ferroelectric thin films; lead compounds; magnesium compounds; pyroelectricity; sputter deposition; PMN-PT thin films; Pb(Mg0.33Nb0.66)O3-PbTiO3; Pt(111)-coated Si wafer substrates; Pt-Si; electrocaloric application; lead magnesium niobate-lead titanate thin films; multitarget reactive sputtering; Crystals; Dielectrics; Electric fields; Films; Niobium; Sputtering; Temperature; PMN-PT; multi-target reactive sputtering;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Applications of Ferroelectrics, International Workshop on Acoustic Transduction Materials and Devices & Workshop on Piezoresponse Force Microscopy (ISAF/IWATMD/PFM), 2014 Joint IEEE International Symposium on the
Conference_Location :
State College, PA
Type :
conf
DOI :
10.1109/ISAF.2014.6922988
Filename :
6922988
Link To Document :
https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=49&DC=119168
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