Title :
FePt fct phase ordered alloy thin film prepared by 30-s annealing with fe-o under-layer
Author :
Yano, Akira ; Koda, Tetsunori ; Matsunuma, Satoshi
Author_Institution :
Dev. & Technol. Div., Hitachi Maxell, Ltd, Tsukuba, Japan
Abstract :
Fe-O under-layers formed by reactive sputtering with oxygen were applied as under-layers for c-axis orientation control of FePt ordered alloy thin films. Short time annealing for 30 seconds, using an infrared lamp heater was applied. The FePt ordered alloy thin films with Fe-O under-layers after annealing exhibited excellent perpendicular magnetic properties, high perpendicular anisotropy, highly ordered fct-FePt alloy phase and high c-axis orientation.
Keywords :
iron alloys; magnetic annealing; magnetic thin films; perpendicular magnetic anisotropy; sputtering; 30 s; Fe-O; Fe-O under-layer; FePt; annealing; c-axis orientation; infrared lamp heater; perpendicular anisotropy; perpendicular magnetic property; phase ordered alloy; reactive sputtering; thin film; Anisotropic magnetoresistance; Annealing; Infrared heating; Iron; Lamps; Magnetic films; Magnetic properties; Magnetization; Sputtering; Transistors; Anneal; Fe-O under-layer; FePt; c-axis orientation; fct; infrared lamp heater; ordered alloy; perpendicular anisotropy; thin film;
Journal_Title :
Magnetics, IEEE Transactions on
DOI :
10.1109/TMAG.2005.854779
