Title :
A two-port piezoelectric micromachined ultrasonic transducer
Author :
Sammoura, Firas ; Shelton, Stefon ; Akhbari, Sina ; Horsley, David ; Liwei Lin
Author_Institution :
Dept. of Electr. Eng. & Comput. Sci., Masdar Inst. of Sci. & Technol., Abu Dhabi, United Arab Emirates
Abstract :
A two-port piezoelectric micromachined ultrasound transducer (pMUT) has been demonstrated using aluminum nitride (AlN) as the piezoelectric material with good linearity, high acoustic pressure per unit input voltage, and enhanced electromechanical coupling factor. Experimental data are found to match well with values predicted by the theoretical models. The magnitude of the second harmonic of a two-port pMUT is characterized as 485% lower than that of a conventional one-port pMUT.
Keywords :
aluminium compounds; micromachining; piezoelectric materials; piezoelectric transducers; ultrasonic transducers; AlN; aluminum nitride; electromechanical coupling factor; piezoelectric material; second harmonic magnitude; two-port pMUT; two-port piezoelectric micromachined ultrasonic transducer; Acoustics; Electrodes; Harmonic analysis; III-V semiconductor materials; Transducers; Ultrasonic imaging; Ultrasonic transducers; acoutic pressure; electromechanical coupling factor; harmonic imaging; linearity; pMUT; piezoelectric micromachined ultrasonic transducer; two-port;
Conference_Titel :
Applications of Ferroelectrics, International Workshop on Acoustic Transduction Materials and Devices & Workshop on Piezoresponse Force Microscopy (ISAF/IWATMD/PFM), 2014 Joint IEEE International Symposium on the
Conference_Location :
State College, PA
DOI :
10.1109/ISAF.2014.6923004
