Title :
Novel fabrication method of IBICVD for FePt and CoPt particles
Author :
Xu, Qingyu ; Kageyama, Yasuyuki ; Suzuki, Takao
Author_Institution :
Inf. Storage Mater. Lab., Toyota Technol. Inst., Nagoya, Japan
Abstract :
A novel fabrication method of ion beam-induced chemical vapor deposition with a focused ion beam system has been applied to fabricate FePt and CoPt particles. The size of the particles depends on the pattern size and frame number. The FePt particles with smallest diameter of about 110 nm were prepared. Both FePt and CoPt particles show fcc structures and soft ferromagnetic properties. Decreasing the Ga+ ion beam intensity may improve the crystallization structure of the particles. Concentric ring magnetic domain patterns have been observed in FePt and annealed CoPt particles with diameter of about 2 μm.
Keywords :
chemical vapour deposition; cobalt alloys; ferromagnetic materials; ion beam assisted deposition; iron alloys; magnetic domains; materials preparation; particle size; platinum alloys; soft magnetic materials; CoPt; FePt; IBICVD; crystallization; fabrication method; focused ion beam; frame number; ion beam induced chemical vapor deposition; magnetic domain; particles size; pattern size; soft ferromagnetism; Annealing; Chemical vapor deposition; Fabrication; Ion beams; Magnetic devices; Magnetic domains; Magnetic hysteresis; Magnetic materials; Material storage; Sensor arrays; Crystallization; focused ion beam (FIB); hysteresis loop; ion beam-induced chemical vapor deposition (IBICVD); magnetic domain;
Journal_Title :
Magnetics, IEEE Transactions on
DOI :
10.1109/TMAG.2005.855332
