• DocumentCode
    1192561
  • Title

    An Analytical Model of Electric Substrate Losses for Planar Spiral Inductors on Silicon

  • Author

    Goni, Alfredo ; Pino, Javier Del ; Gonzalez, Borja ; Hernández, Antonio

  • Author_Institution
    Inst. for Appl. Microelectron., Univ. de Las Palmas de Gran Canaria
  • Volume
    54
  • Issue
    3
  • fYear
    2007
  • fDate
    3/1/2007 12:00:00 AM
  • Firstpage
    546
  • Lastpage
    553
  • Abstract
    This paper presents a physically based model for estimating the substrate losses due to electric field penetration for planar spiral inductors on silicon not using patterned ground shield. The model, which does not use any fitting parameter, shows excellent agreement with measured data. It has been tested across a variety of inductor geometries and two different substrates up to 10 GHz
  • Keywords
    Q-factor; eddy currents; inductors; semiconductor device models; silicon; Q -factor; Si; eddy current; electric substrate losses; planar spiral inductors; proximity effect; radio frequency integrated circuit; skin effect; substrate loss; Analytical models; Capacitance; Inductors; Magnetic field measurement; Magnetic fields; Radio frequency; Radiofrequency integrated circuits; Silicon; Skin effect; Spirals; $Q$-factor; Eddy current; proximity effect; radio-frequency (RF) integrated circuit; skin effect; spiral inductor; substrate loss;
  • fLanguage
    English
  • Journal_Title
    Electron Devices, IEEE Transactions on
  • Publisher
    ieee
  • ISSN
    0018-9383
  • Type

    jour

  • DOI
    10.1109/TED.2006.890366
  • Filename
    4114841