Title :
An Analytical Model of Electric Substrate Losses for Planar Spiral Inductors on Silicon
Author :
Goni, Alfredo ; Pino, Javier Del ; Gonzalez, Borja ; Hernández, Antonio
Author_Institution :
Inst. for Appl. Microelectron., Univ. de Las Palmas de Gran Canaria
fDate :
3/1/2007 12:00:00 AM
Abstract :
This paper presents a physically based model for estimating the substrate losses due to electric field penetration for planar spiral inductors on silicon not using patterned ground shield. The model, which does not use any fitting parameter, shows excellent agreement with measured data. It has been tested across a variety of inductor geometries and two different substrates up to 10 GHz
Keywords :
Q-factor; eddy currents; inductors; semiconductor device models; silicon; Q -factor; Si; eddy current; electric substrate losses; planar spiral inductors; proximity effect; radio frequency integrated circuit; skin effect; substrate loss; Analytical models; Capacitance; Inductors; Magnetic field measurement; Magnetic fields; Radio frequency; Radiofrequency integrated circuits; Silicon; Skin effect; Spirals; $Q$-factor; Eddy current; proximity effect; radio-frequency (RF) integrated circuit; skin effect; spiral inductor; substrate loss;
Journal_Title :
Electron Devices, IEEE Transactions on
DOI :
10.1109/TED.2006.890366
