Title :
Investigation of anomalous losses in thick Cu ferromagnetic spiral inductors
Author :
Viala, B. ; Royet, A.S. ; Couderc, S.
Author_Institution :
Lab d´´Electron. et de Technol. de l´´Inf., CEA, Centre d´´Etudes Nucleaires de Grenoble, France
Abstract :
Ferromagnetic spiral inductors were fabricated using thick copper technology. 30% increase in L is shown over the air core value. However, we observe a large restriction in Q when frequency is beyond 1 GHz. This strongly contrasts with the high ferromagnetic resonance (FMR) frequency measured at 6 GHz. Also still increasing the FMR up to 10 GHz using multipatterning do not improve Q. The highlight is on excess losses not originating from magnetic losses (μ´´) and the Joule effect. Additionally, when comparing multiturn inductor to single strip inductor, proximity effect or current crowding is shown responsible.
Keywords :
Q-factor; copper; ferromagnetic materials; ferromagnetic resonance; magnetic leakage; thick film inductors; 6 GHz; Cu; Joule effect; anomalous losses; current crowding; ferromagnetic resonance; ferromagnetic spiral inductors; multipatterning; proximity effect; quality factor; restriction; Copper; Frequency; Inductors; Magnetic anisotropy; Magnetic films; Magnetic materials; Magnetic resonance; Magnetic separation; Perpendicular magnetic anisotropy; Spirals; Ferromagnetic material; RF inductors; quality factor; series losses;
Journal_Title :
Magnetics, IEEE Transactions on
DOI :
10.1109/TMAG.2005.855183
