Investigation of anomalous losses in thick Cu ferromagnetic spiral inductors

Author

Viala, B. ; Royet, A.S. ; Couderc, S.

Author_Institution

Lab d´´Electron. et de Technol. de l´´Inf., CEA, Centre d´´Etudes Nucleaires de Grenoble, France

Volume

41

Issue

10

fYear

2005

Firstpage

3583

Lastpage

3585

Abstract

Ferromagnetic spiral inductors were fabricated using thick copper technology. 30% increase in L is shown over the air core value. However, we observe a large restriction in Q when frequency is beyond 1 GHz. This strongly contrasts with the high ferromagnetic resonance (FMR) frequency measured at 6 GHz. Also still increasing the FMR up to 10 GHz using multipatterning do not improve Q. The highlight is on excess losses not originating from magnetic losses (μ´´) and the Joule effect. Additionally, when comparing multiturn inductor to single strip inductor, proximity effect or current crowding is shown responsible.

Keywords

Q-factor; copper; ferromagnetic materials; ferromagnetic resonance; magnetic leakage; thick film inductors; 6 GHz; Cu; Joule effect; anomalous losses; current crowding; ferromagnetic resonance; ferromagnetic spiral inductors; multipatterning; proximity effect; quality factor; restriction; Copper; Frequency; Inductors; Magnetic anisotropy; Magnetic films; Magnetic materials; Magnetic resonance; Magnetic separation; Perpendicular magnetic anisotropy; Spirals; Ferromagnetic material; RF inductors; quality factor; series losses;

fLanguage

English

Journal_Title

Magnetics, IEEE Transactions on

Publisher

ieee

ISSN

0018-9464

Type

jour

DOI

10.1109/TMAG.2005.855183

Filename

1519377