DocumentCode
1193114
Title
Guest editorial optical MEMS and its future trends
Author
Lin, Lih Y. ; Wu, Ming C. ; Sawada, Renshi ; Mohr, J.A.
Author_Institution
University of California
Volume
21
Issue
3
fYear
2003
fDate
3/1/2003 12:00:00 AM
Firstpage
582
Lastpage
583
Keywords
Art; Biomedical optical imaging; Communication industry; Displays; Fabrication; Integrated optics; Lasers and Electro-Optics Society; Micromechanical devices; Optical sensors; Research and development;
fLanguage
English
Journal_Title
Lightwave Technology, Journal of
Publisher
ieee
ISSN
0733-8724
Type
jour
DOI
10.1109/JLT.2003.810734
Filename
1197920
Link To Document