• DocumentCode
    1193159
  • Title

    Advances in high-Q piezoelectric resonator materials and devices

  • Author

    Ballato, Arthur ; Gualtieri, John G.

  • Author_Institution
    US Army Res. Lab. Electron. & Power Sources Directorate, Fort Monmouth, NJ, USA
  • Volume
    41
  • Issue
    6
  • fYear
    1994
  • Firstpage
    834
  • Lastpage
    844
  • Abstract
    In order to compare piezoelectric materials and devices, an intrinsic parameter, the motional time constant /spl tau//sub 1//sup (m/)=(/spl omega//sub m/Q/sub m/)/sup -1/ for a particular mode m is employed. The use of /spl tau//sub 1//sup (m/) follows from the accommodation of acoustic loss in the elastic compliance/stiffness and the establishment of material coefficients that are elements of viscosity matrices. Alternative and fully equivalent definitions of /spl tau//sub 1/ are given based on the RC time constant derived from the equivalent circuit representation of a crystal resonator, acoustic attenuation, logarithmic decrement, and viscosity or damping. For quartz devices, the variation of /spl tau//sub 1/: for any simple thickness mode, for the Y´X shear mode for rotated Y-cuts, and with diameter-thickness ratio for AT-cuts is discussed. Other factors such as mounting loss and loss caused by crystal inhomogeneities (dislocations, defect positions in the resonator, and impurity migration under vibrational stress) are briefly considered with quartz devices as the model. Some new piezoelectric materials/material constants/devices are reviewed and their motional time constants are compared. A physical parameter, composed of acoustic velocity, piezoelectric coupling, and /spl tau//sub 1/ is identified which aids in understanding the maximum frequency limitations of plate resonators.<>
  • Keywords
    Q-factor; acoustic resonators; crystal resonators; equivalent circuits; piezoelectric materials; quartz; surface acoustic wave devices; AT-cuts; RC time constant; SAW resonators; SiO; acoustic attenuation; acoustic loss; crystal inhomogeneities; crystal resonator; diameter-thickness ratio; elastic compliance/stiffness; equivalent circuit representation; high-Q piezoelectric resonator; logarithmic decrement; motional time constant; mounting loss; piezoelectric materials; plate resonators; quartz devices; resonator materials; rotated Y-cuts; shear mode; viscosity matrices; Acoustic devices; Acoustic materials; Attenuation; Crystalline materials; Damping; Equivalent circuits; Impurities; Piezoelectric devices; Piezoelectric materials; Viscosity;
  • fLanguage
    English
  • Journal_Title
    Ultrasonics, Ferroelectrics, and Frequency Control, IEEE Transactions on
  • Publisher
    ieee
  • ISSN
    0885-3010
  • Type

    jour

  • DOI
    10.1109/58.330264
  • Filename
    330264