1/f noise in etched groove surface acoustic wave (SAW) resonators

Measurements of 1/f (or flicker) frequency fluctuations in SAW resonators fabricated with etched groove reflectors on single crystal quartz have shown that the observed noise levels vary inversely with device size. These measurements were made on sixteen 450 MHz resonators of four different sizes. The 1/f noise levels were also evaluated on twenty-eight other SAW resonators ranging in frequency from 401 to 915 MHz. This additional data provides valuable information on the dependence of the flicker noise levels on resonator frequency. A model based an localized, independent velocity fluctuations in the quartz is proposed which correctly fits the observed size and frequency dependence of the measured 1/f noise levels. This model suggests that the velocity fluctuations originate in small regions (much less than /spl sim/5 /spl mu/m in diameter) randomly distributed throughout the quartz with an average separation of about 5 /spl mu/m between independent (incoherent) sources. The magnitude of the localized fractional velocity fluctuations, /spl Delta/v/v, averaged over a 5 micron cube is on the order of 1/spl times/10/sup -9/.<>