Effect of a ferroelectric inversion layer on the temperature characteristics of SH-Type surface acoustic waves on 36/spl deg/ Y-X LiTaO/sub 3/ substrates

Author

Nakamura, Kiyoshi ; Tourlog, Ailie

Author_Institution

Dept. of Electr. Commun., Tohoku Univ., Sendai, Japan

Volume

41

Issue

6

fYear

1994

Firstpage

872

Lastpage

875

Abstract

The temperature coefficient of delay of the SH-type surface acoustic wave on 36/spl deg/ Y-X LiTaO/sub 3/ substrates with a ferroelectric inversion layer is theoretically analyzed and it is shown that the temperature characteristics can be improved by an electric-field short-circuiting effect of the domain boundary. The experimental results of the temperature coefficient of delay agree well with the theoretical. The minimum value of measured temperature coefficients of delay is 12.6 ppm//spl deg/C for the metallized surface case, which is about one-third of that in a 36/spl deg/ Y-X substrate with no inversion layer. Experimental results on the phase velocity and the electromechanical coupling factor of the SH-type surface acoustic wave are also presented and compared with the theoretical.<>

Keywords

ferroelectric Curie temperature; ion exchange; lithium compounds; surface acoustic wave devices; surface acoustic waves; 36/spl deg/ Y-X LiTaO/sub 3/ substrates; LiTaO/sub 3/; SH-Type surface acoustic waves; domain boundary; electric-field short-circuiting effect; electromechanical coupling factor; ferroelectric inversion layer; leaky SAW devices; metallized surface; phase velocity; proton exchange; shear horizontal waves; temperature characteristics; Acoustic waves; Circuits; Delay effects; Ferroelectric materials; Metallization; Propagation delay; Substrates; Surface acoustic wave devices; Surface acoustic waves; Temperature measurement;

fLanguage

English

Journal_Title

Ultrasonics, Ferroelectrics, and Frequency Control, IEEE Transactions on

Publisher

ieee

ISSN

0885-3010

Type

jour

DOI

10.1109/58.330268

Filename

330268