Title :
Effect of a ferroelectric inversion layer on the temperature characteristics of SH-Type surface acoustic waves on 36/spl deg/ Y-X LiTaO/sub 3/ substrates
Author :
Nakamura, Kiyoshi ; Tourlog, Ailie
Author_Institution :
Dept. of Electr. Commun., Tohoku Univ., Sendai, Japan
Abstract :
The temperature coefficient of delay of the SH-type surface acoustic wave on 36/spl deg/ Y-X LiTaO/sub 3/ substrates with a ferroelectric inversion layer is theoretically analyzed and it is shown that the temperature characteristics can be improved by an electric-field short-circuiting effect of the domain boundary. The experimental results of the temperature coefficient of delay agree well with the theoretical. The minimum value of measured temperature coefficients of delay is 12.6 ppm//spl deg/C for the metallized surface case, which is about one-third of that in a 36/spl deg/ Y-X substrate with no inversion layer. Experimental results on the phase velocity and the electromechanical coupling factor of the SH-type surface acoustic wave are also presented and compared with the theoretical.<>
Keywords :
ferroelectric Curie temperature; ion exchange; lithium compounds; surface acoustic wave devices; surface acoustic waves; 36/spl deg/ Y-X LiTaO/sub 3/ substrates; LiTaO/sub 3/; SH-Type surface acoustic waves; domain boundary; electric-field short-circuiting effect; electromechanical coupling factor; ferroelectric inversion layer; leaky SAW devices; metallized surface; phase velocity; proton exchange; shear horizontal waves; temperature characteristics; Acoustic waves; Circuits; Delay effects; Ferroelectric materials; Metallization; Propagation delay; Substrates; Surface acoustic wave devices; Surface acoustic waves; Temperature measurement;
Journal_Title :
Ultrasonics, Ferroelectrics, and Frequency Control, IEEE Transactions on
