Beam-steering micromirrors for large optical cross-connects

Author

Aksyuk, V.A. ; Pardo, F. ; Carr, D. ; Greywall, D. ; Chan, H.B. ; Simon, M.E. ; Gasparyan, A. ; Shea, H. ; Lifton, V. ; Bolle, C. ; Arney, S. ; Frahm, R. ; Paczkowski, M. ; Haueis, M. ; Ryf, Ronald ; Neilson, David T. ; Kim, J. ; Giles, C. Randy ; Bishop,

Author_Institution

Lucent Technol. Bell Labs., Murray Hill, NJ, USA

Volume

21

Issue

3

fYear

2003

fDate

3/1/2003 12:00:00 AM

Firstpage

634

Lastpage

642

Abstract

This paper describes Si-micromachined two-axis beam-steering micromirrors and their performance in 256 × 256- and 1024 × 1024-port large optical cross-connects (OXCs). The high-reflectivity wavelength-independent mirrors are electrostatically actuated; capable of large, continuous, controlled, dc tilt in any direction at moderate actuation voltages; and allow setting times of a few milliseconds. Packaged two-dimensional (2-D) arrays containing independently addressable identical 256 and 1296 mirrors are used to build fully functional bitrate and wavelength-independent single-stage, low-insertion-loss, single-mode fiber OXC fabrics.

Keywords

beam steering; electrostatic actuators; micromachining; micromirrors; optical arrays; optical interconnections; photonic switching systems; OXCs; Si; Si-micromachined two-axis beam-steering micromirrors; continuous controlled dc tilt; electrostatic actuation; high-reflectivity wavelength-independent mirrors; large optical cross-connects; moderate actuation voltages; packaged two-dimensional arrays; setting times; single-stage low-insertion-loss single-mode fiber OXC fabrics; surface micromachining; Costs; Insertion loss; Micromirrors; Mirrors; Optical attenuators; Optical fiber networks; Optical filters; Optical losses; Stimulated emission; Wavelength division multiplexing;

fLanguage

English

Journal_Title

Lightwave Technology, Journal of

Publisher

ieee

ISSN

0733-8724

Type

jour

DOI

10.1109/JLT.2003.811792

Filename

1197928