High-sensitivity InSb thin-film micro-Hall sensor arrays for simultaneous multiple detection of magnetic beads for biomedical applications

Author

Togawa, Kiyoshi ; Sanbonsugi, Hideaki ; Lapicki, Adam ; Abe, Masanori ; Handa, Hiroshi ; Sandhu, Adarsh

Author_Institution

Dept. of Electr. & Electron. Eng., Tokyo Inst. of Technol., Japan

Volume

41

Issue

10

fYear

2005

Firstpage

3661

Lastpage

3663

Abstract

An InSb thin-film linear micro-Hall sensor array of eight sensors, each with a sensitivity of 10 nT/Hz¹2/ was developed for biomedical applications. The individual Hall sensors had an active area of 5 μm×5 μm and were separated by a distance of 5 μm. A combination of these Hall devices and a magnetization system incorporating both dc and ac bias magnetic fields, enabled the simultaneous detection of multiple 2.8 μm diameter superparamagnetic beads.

Keywords

Hall effect devices; III-V semiconductors; biomedical equipment; biosensors; indium compounds; magnetic sensors; magnetic thin film devices; microsensors; superparamagnetism; Hall devices; Hall effect devices; InSb; biomedical applications; biomedical equipment; magnetic sensors; magnetic thin film devices; magnetization system; multiple magnetic bead detection; superparamagnetic beads; thin-film linear micro-Hall sensor array; Biosensors; Chemical sensors; Magnetic fields; Magnetic films; Magnetic sensors; Magnetic separation; Micromagnetics; SQUIDs; Sensor arrays; Thin film sensors; Hall effect devices; magnetic particles; magnetic sensors; nanostructure materials;

fLanguage

English

Journal_Title

Magnetics, IEEE Transactions on

Publisher

ieee

ISSN

0018-9464

Type

jour

DOI

10.1109/TMAG.2005.854789

Filename

1519403