Title :
High-sensitivity InSb thin-film micro-Hall sensor arrays for simultaneous multiple detection of magnetic beads for biomedical applications
Author :
Togawa, Kiyoshi ; Sanbonsugi, Hideaki ; Lapicki, Adam ; Abe, Masanori ; Handa, Hiroshi ; Sandhu, Adarsh
Author_Institution :
Dept. of Electr. & Electron. Eng., Tokyo Inst. of Technol., Japan
Abstract :
An InSb thin-film linear micro-Hall sensor array of eight sensors, each with a sensitivity of 10 nT/Hz12/ was developed for biomedical applications. The individual Hall sensors had an active area of 5 μm×5 μm and were separated by a distance of 5 μm. A combination of these Hall devices and a magnetization system incorporating both dc and ac bias magnetic fields, enabled the simultaneous detection of multiple 2.8 μm diameter superparamagnetic beads.
Keywords :
Hall effect devices; III-V semiconductors; biomedical equipment; biosensors; indium compounds; magnetic sensors; magnetic thin film devices; microsensors; superparamagnetism; Hall devices; Hall effect devices; InSb; biomedical applications; biomedical equipment; magnetic sensors; magnetic thin film devices; magnetization system; multiple magnetic bead detection; superparamagnetic beads; thin-film linear micro-Hall sensor array; Biosensors; Chemical sensors; Magnetic fields; Magnetic films; Magnetic sensors; Magnetic separation; Micromagnetics; SQUIDs; Sensor arrays; Thin film sensors; Hall effect devices; magnetic particles; magnetic sensors; nanostructure materials;
Journal_Title :
Magnetics, IEEE Transactions on
DOI :
10.1109/TMAG.2005.854789
