Title :
Piezoelectric ultrasonic micromotor with 1.5 mm diameter
Author :
Dong, Shuxiang ; Lim, Siak P. ; Lee, Kwork H. ; Zhang, Jingdong ; Lim, Leong C. ; Uchino, Kenji
Author_Institution :
Mater. Res. Inst., Pennsylvania State Univ., University Park, PA, USA
fDate :
4/1/2003 12:00:00 AM
Abstract :
A piezoelectric ultrasonic micromotor has been developed using a lead zirconate titanate (PZT) ceramic/metal composite tube stator that was 1.5 mm in diameter and 7 mm in length. The micromotor was operated in its first bending vibration mode (/spl sim/70 kHz), producing speeds from hundreds to over 2000 rpm in both rotational directions. The maximum torque-output was 45 /spl mu/N-m, which is far superior to previous PZT thin film-based micromotors. This micromotor showed good reliability and stability for more than 300 hours of continued operation.
Keywords :
bending; lead compounds; micromotors; stators; torque; ultrasonic motors; vibrations; 1.5 mm; 7 mm; 70 kHz; PZT; PZT ceramic/metal composite tube stator; PbZrO3TiO3; bending vibration mode; piezoelectric ultrasonic micromotor; torque; Ceramics; Microactuators; Micromotors; Piezoelectric films; Rotors; Silicon; Stability; Stators; Titanium compounds; Torque;
Journal_Title :
Ultrasonics, Ferroelectrics, and Frequency Control, IEEE Transactions on
DOI :
10.1109/TUFFC.2003.1197958
