DocumentCode :
1193899
Title :
Realization of free-space optical pickup head with stacked Si-based phase elements
Author :
Jenq-Yang Chang ; Chih-Ming Wang ; Chien-Chieh Lee ; Hsi-Fu Shih ; Mount-Learn Wu
Author_Institution :
Inst. of Opt. Sci., Nat. Central Univ., Jung-Li, Taiwan
Volume :
17
Issue :
1
fYear :
2005
Firstpage :
214
Lastpage :
216
Abstract :
We have developed a novel stacked silicon-based microoptical system, which is optical-on-axis and transmissible in both visible and infrared ranges. By using the new microoptical system techniques, we fabricated a miniaturized optical pickup head module. This optical pickup head consisted of a 650-nm laser diode, a 45/spl deg/ silicon reflector, a grating, a holographic optical element, and some aspherical Fresnel lenses. These optical phase elements fabricated on a SiN/sub x/ membrane were suspended on Si chips. Each element was then stacked by chip bonding. We could obtain a circular focusing spot on the optical disc as small as 3.1 μm.
Keywords :
aspherical optics; bonding processes; diffraction gratings; holographic optical elements; integrated optics; lenses; micro-optics; optical fabrication; optical focusing; semiconductor lasers; silicon; 650 nm; Si; aspherical Fresnel lenses; chip bonding; circular focusing spot; free-space optical pickup head; grating; holographic optical element; laser diode; microoptical systems; optical phase elements; silicon reflector; Biomembranes; Educational institutions; Glass; Gratings; Holographic optical components; Holography; Integrated optics; Lithography; Optical waveguides; Silicon compounds; Diffractive optical elements; SiN; microoptoelectromechanical systems (MOEMS); pickup module;
fLanguage :
English
Journal_Title :
Photonics Technology Letters, IEEE
Publisher :
ieee
ISSN :
1041-1135
Type :
jour
DOI :
10.1109/LPT.2004.836896
Filename :
1372634
Link To Document :
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