Title :
High coercivity Co-ferrite thin films on SiO2 (100) substrate prepared by sputtering and PLD
Author :
Yin, Jianhua ; Ding, Jun ; Liu, Binghai ; Wang, Yongchao ; Yi, Jiabao ; Chen, Jingsheng ; Miao, Xiangshui
Author_Institution :
Dept. of Mater. Sci. & Eng., Nat. Univ. of Singapore, Singapore
Abstract :
Co-ferrite thin films with high coercivity were deposited on SiO2 single crystal substrates by sputtering and pulsed laser deposition (PLD). All the films were subsequently annealed at a temperature from 500°C to 1200°C. Magnetic properties were found to be strongly related to annealing temperature, substrate, thickness and thin film deposition methods. A coercivity as high as 9.3 kOe was achieved in the 50 nm film after annealing at 900°C for 15 min deposited on (100)-SiO2 substrate using sputtering. The high coercivity was associated with the nano-structure, relatively large micro-strain, and a high density of defects.
Keywords :
amorphous magnetic materials; cobalt alloys; coercive force; ferrites; magnetic annealing; magnetic thin films; pulsed laser deposition; silicon compounds; sputter deposition; 15 min; 50 nm; 50 to 1200 C; 900 C; Co; SiO2; ferrite thin films; high coercivity films; magnetic annealing; magnetic properties; microstrain; nanostructure; pulsed laser deposition; sputtering deposition; Annealing; Coercive force; Magnetic films; Magnetic properties; Optical pulses; Pulsed laser deposition; Sputtering; Substrates; Temperature; Transistors; Co-ferrite; high coercivity; pulsed laser deposition; sputtering;
Journal_Title :
Magnetics, IEEE Transactions on
DOI :
10.1109/TMAG.2005.854946