DocumentCode

1194041

Title

Changes in the Editorial Board

Author

Boning, Duane S.

Author_Institution

Massachusetts Institute of Technology

Volume

16

Issue

2

fYear

2003

fDate

5/1/2003 12:00:00 AM

Firstpage

89

Lastpage

89

fLanguage

English

Journal_Title

Semiconductor Manufacturing, IEEE Transactions on

Publisher

ieee

ISSN

0894-6507

Type

jour

DOI

10.1109/TSM.2003.810933

Filename

1198013