• DocumentCode
    1194047
  • Title

    Planarized thin film inductors and capacitors for hybrid integrated circuits made of aluminum and anodic alumina

  • Author

    Surganov, Victor

  • Author_Institution
    Dept. of Microelectron., Minsk Radio Eng. Inst., Byelorussia
  • Volume
    17
  • Issue
    2
  • fYear
    1994
  • fDate
    5/1/1994 12:00:00 AM
  • Firstpage
    197
  • Lastpage
    200
  • Abstract
    Planarized inductors and capacitors made of aluminum layers by electrochemical anodization technique have been tested in the frequency region of 1 kHz-300 MHz at temperatures of 293-473 K. These microcomponents can be used for high-frequency hybrid integrated circuits
  • Keywords
    alumina; aluminium; anodisation; electrolytic capacitors; hybrid integrated circuits; inductors; thin film capacitors; thin film circuits; 1 kHz to 300 MHz; 293 to 473 K; Al; Al2O3; anodic alumina; electrochemical anodization technique; high-frequency hybrid IC; hybrid integrated circuits; microcomponents; planarized components; thin film capacitors; thin film inductors; Aluminum; Capacitors; Dielectric substrates; Dielectric thin films; Frequency; Hybrid integrated circuits; Inductance; Magnetic separation; Thin film circuits; Thin film inductors;
  • fLanguage
    English
  • Journal_Title
    Components, Packaging, and Manufacturing Technology, Part B: Advanced Packaging, IEEE Transactions on
  • Publisher
    ieee
  • ISSN
    1070-9894
  • Type

    jour

  • DOI
    10.1109/96.330429
  • Filename
    330429
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=1194047