1194050

Guest editorial special section on single-wafer manufacturing in the nanochip era

Singh, Rajdeep ; Chih-Yuan Lu ; Koike, Atsushi ; Thompson, Mark ; Thakur, R.P.S.

Clemson University

16

2

2003

5/1/2003 12:00:00 AM

90

95

Costs; Electronic equipment manufacture; Electronics industry; Environmental economics; Integrated circuit technology; Manufacturing; Marketing and sales; Semiconductor device manufacture; Silicon germanium; Silicon on insulator technology;

English

Semiconductor Manufacturing, IEEE Transactions on

ieee

0894-6507

jour

10.1109/TSM.2003.810921

1198014