Wireless magnetic micromachine of planar structure with magnetic thin film

Author

Yamazaki, Aya ; Sendoh, Masahiko ; Ishiyama, Kazushi ; Arai, Ken Ichi

Author_Institution

Res. Inst. of Electr. Commun., Tohoku Univ., Sendai, Japan

Volume

41

Issue

10

fYear

2005

Firstpage

4021

Lastpage

4023

Abstract

Magnetic micromachines are driven by a magnetic field. They require no power supply cables, no batteries, and no controlling systems on the body of the machine. The magnetic micromachine of planar structure was fabricated with magnetic thin film. The size of this micromachine is 30×60×12 μm. The micromachine swam at the rotational frequency of 1-10 Hz in the water with a kinematic viscosity of 1 mm²/s and a Reynolds number of 0.1-1. The magnetic torque required for rotating the micromachine was very small, and it was clarified that the value could be realized with a magnetic thin film.

Keywords

magnetic thin film devices; micromechanical devices; torque; 1 to 10 Hz; 12 micron; 30 micron; 60 micron; Reynolds number; magnetic field; magnetic thin film; magnetic torque; micromachine swam; planar structure; propeller shape; wireless magnetic micromachine; Batteries; Cables; Control systems; Frequency; Kinematics; Magnetic fields; Magnetic films; Micromagnetics; Power supplies; Viscosity; Magnetic field; Reynolds number; magnetic thin film; micromachine; planar structure; propeller shape;

fLanguage

English

Journal_Title

Magnetics, IEEE Transactions on

Publisher

ieee

ISSN

0018-9464

Type

jour

DOI

10.1109/TMAG.2005.855156

Filename

1519522