Title :
Measurements of vacuum arc ion charge-state distributions
Author :
Brown, Ian G. ; Galvin, J.E.
Author_Institution :
Lawrence Berkeley Lab., California Univ., Berkeley, CA, USA
fDate :
10/1/1989 12:00:00 AM
Abstract :
The charge-state distribution of ions generated in the metal vapor vacuum arc under a wide range of experimental conditions was measured. The experiments were carried out using an ion source in which the metal vapor vacuum arc is used as the method of plasma production and by which a high-quality, high-current beam of metal ions is produced. Charge-state spectra were measured using a time-of-flight diagnostic; arc voltages were also measured. Parameters that were varied include cathode material, arc current, axial magnetic field strength, neutral gas pressure, and arc geometry
Keywords :
arcs (electric); plasma diagnostics; arc current; arc geometry; axial magnetic field strength; cathode material; charge state spectra; high-current beam; ion source; metal ions; metal vapor; neutral gas pressure; plasma production; time-of-flight diagnostic; vacuum arc ion charge-state distributions; Current measurement; Ion sources; Magnetic field measurement; Magnetic materials; Plasma diagnostics; Plasma materials processing; Plasma measurements; Plasma sources; Production; Vacuum arcs;
Journal_Title :
Plasma Science, IEEE Transactions on
